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Underbake

1、烘烤不足

减弱光刻胶的强度常见问题：a、烘烤不足（Underbake）。减弱光刻胶的强度（抗刻蚀能力和离阻挡能力）；降低针孔填充能力（）；降低针孔填充能力子注入中的阻挡能力）；降低针孔填...

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